Klemenz Fritz; Mathias Küster; Volker Dorka; Bernd J Seitz; Wolfram Köhler; Wolfgang Hug; Konrad Kunze; Lars Fischer; Ri Lavori, Ernst Verlag (2003) Kovakantinen kirja
This completely revised edition of the first concise introduction to microsystems technology includes the latest trends of this emerging scientific discipline. Especially the chapters on silicium and LIGA technology are severely expanded. New topics include application aspects in medicine and health technology, lithography and electroplating.