Nano- and microsystem technology are among the most promising developments for the next millennium. To build such new systems entirely new techniques have to be developed, and microlithography is one of them. Microlithography is the creation of microscopic patterns on a variety of substrate materials. It involves controlling material boundaries with accuracies approaching atomic dimensions. This technology enables the processing of modern integrated circuits with better performance and storage density. It is a prerequisite for microsystem technology. This concise handbook supplies the background information needed to enter the emerging field of nanoscience and to develop new devices at the nanoscale.