This book offers complete coverage of optical micro-/nanotechnology, from the fabrication of micro-/nanoscale devices to the variety of applications. With contributions from renowned industry experts, this is a one-stop resource for optical micro and nanotechnology. Each chapter focuses on a separate device, systematically covering the fundamentals, fabrication, device characterization, existing applications, and future applications. "Optical Micro and Nanotechnology" includes details on devices ranging from nano-sensing devices to optical MEMS/MOEMS to photonic microresonators. The book also offers extensive coverage of photonic meta-materials, and includes hundreds of illustrations.